工藝應用

簡稱

In-situ substrate preclean 預清潔

PC

Ion-beam modification of material and surface properties
材料和表面改性

IBSM

- Surface polishing or smoothing 表面拋光

- Surface nanostructures and texturing
表面納米結構和紋理

- Ion figuring and enhancement 離子計算和增強

- Ion trimming and tuning 離子修整和調諧

- Surface-activated bonding 表面激活鍵合

SAB

Ion-beam-assisted deposition 輔助鍍膜

IBAD

Ion-beam etching 離子蝕刻

IBE

- Reactive ion-beam etching 活性離子束蝕刻

RIBE

- Chemically assisted ion-beam etching 化學輔助離子束蝕刻

CAIBE

Ion-beam sputter deposition 離子濺射

IBSD

- Reactive ion-beam sputter deposition 反應離子濺射

RIBSD

- Biased target ion-beam sputter deposition
偏壓靶離子束濺射

BTIBSD

Direct deposition 直接沉積

DD

- Hard and functional coatings
硬質和功能性涂料